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NameChuan-Hsi Liu
Office phone number02-7749-3515
Job titleProfessor
Research expertise1.Manufacturing Technology of Integrated Circuits
2.Semiconductor Device Physics and Process
3.Design of Experiments (including ANOVA & Taguchi Method)
Research SummaryProf. Liu received his Ph.D. in Electrical Engineering from Arizona State University, USA, in 1997. He is a Full Professor at Department of Mechatronic Engineering, National Taiwan Normal University. He has published over 100 journal and conference papers and being granted over 20 patents. He has also coauthored a book (in Chinese) entitled Semiconductor Device Physics and Process: Theory & Practice (3rd edition). His current research interests include advanced CMOS technology and its process optimization. Prof. Liu served in the Committee of the IEEE International Electron Devices Meeting (IEDM) in 2003 and 2004.

Research Achievements
Device structure in stress simulation of nMOSFET with Si1-xGex channel

Comparison of each stress component in an Si1-xGex channel region
C-V characteristics and TEM graph of the high-k MOS capacitors
Comparison of Jg-EOT for SiO2 and Hf-based high-k dielectrics
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  1. 期刊論文
  2. 研討會論文
  3. 學術研究計畫
  4. 學術專書單篇(章)
  5. 其他著作
January 2021
  • Automation 2015
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